Article 1
These regulations are promulgated pursuant to Article 15-1 of the Energy Administration Act (hereinafter referred to as the Act).
Article 2
The terms applied in these regulations are defined as follows:
1.Volume: in circumstances of electricity generation or cogeneration systems, refers to installed capacity of power generation equipment; in circumstances of petroleum refineries and massive energy-consumption users, refers to chartered capacity of electricity consumption and installed capacity of self-usage power generation equipment.
2.Category: refers to coal (metric ton), petroleum (kiloliters of oil equivalent), natural gas (kilo cubic meter) and electricity (megawatt).
3.Location: north district, refers to areas located north of Feng-Shan River and north of He-Ping River; central district, refers to areas located south of Feng-Shan River, north of Cho-Shui River, and Hualien County; south district, refers to areas located south of Cho-Shui River not belonging to north and central district as well as Taitung County; offshore islands, refer to islands where no transmission lines connecting to the grid of the main island of Taiwan.
4.Massive energy-consumption users: manufacture listed in the Standard Industrial Classification System of the Republic of China, excluding petroleum refineries listed in Petroleum Administration Act.
5.Application Period: identified by the planned years of the business operation on the energy utilization manual.
6.Estimated Percent Reserve Margin: refers to the estimated value of percent reserve margin calculated by the following formula and announced by the central competent authority for each of the following 6 years.
Estimated Percent Reserve Margin = (aggregated value of net peaking capability of nationwide power systems) + (aggregated value of net peaking capability of projects which have obtained the preparation approval for electricity enterprise establishment - estimated value of peak load of the electricity systems) / estimated value of peak load of the electricity systems
7.Baseline Value of Percent Reserve Margin: refers to the value of percent reserve margin submitted by electricity enterprises and approved and announced by the central competent authority in accordance with the Electricity Act.
8.Letter of Approval for Electricity Consumption Plan: refers to the letter for the approval of applications of electricity consumption plans issued to the electricity enterprises.
Article 3
These regulations apply to the energy users of massive investment and production plan of electricity generation, cogeneration systems, petroleum refineries and massive energy-consumption users (hereinafter referred to as energy users), and the Scope of Applied Energy Users is promulgated in accordance with Article 16, Section 4 of the Act.
Article 4
Energy users shall submit the energy utilization manual for central competent authorities’ approval through authorities which accept such application before the energy consumption facilities are established or expanded. The applicants shall state the reasons and apply directly to a central competent authority if no local authorities accept the application.
The preceding section applies mutatis mutandis when one of the following circumstances occur in content of the approved energy utilization manual:
1.Alteration of the energy use category.
2.Alteration of the location of energy consumption facilities.
3.Increase of the energy consumption volume.
4.Alteration of energy consumption efficiency.
Article 5
Power generating plant energy users' consumption volume, category, and location of application shall be calculated on the basis of nationwide staging and zoning installed capacity prescribed by the Energy Development Policy, and the following rules shall be met:
1.The applicable installed capacity of the category of energy in the applied period shall not be exceeded.
2.The applicable installed capacity of the location in the applied period shall not be exceeded.
The location shall be identified by the parallel connection point between the power transmission lines of established or expanded energy consumption facilities applied by the energy users and the grid.
Article 6
In order to ensure the stability and security of nationwide power supply, power generating plant energy users are not constrained by the preceding article in the following circumstances:
1.Being located on offshore islands, and the installed capacity being not included in the nationwide staging and zoning installed capacity.
2.The estimated percent reserve margin for the years of business operation listed on the energy utilization manual being lower than the baseline value of percent reserve margin.
Article 7
Electricity generation or cogeneration systems energy users' efficiency shall meet the following rules of best available techniques:
1.Utility systems and equipment (as table 1).
2.Processing techniques for electricity generation or cogeneration systems (as table 2).
The preceding section is not applicable in circumstances of being restricted by laws and regulations, patent right protection, international trade barriers, or other factors not attributable to the applicants, given evidence are submitted by the applicants.
Article 8
The applied volume category, and location of petroleum refineries or massive energy- consumption users shall meet the following rules:
1.Supplying capacity of electricity enterprise listed on the energy utilization manual shall be provided with letter of approval for Electricity Consumption Plan issued by an electricity enterprise and not exceed the approved supplying capacity.
2.Supplying capacity of self-usage power generation equipment listed on the energy utilization manual shall be provided with supporting evidence to explain there is no concern for blackout in the self-usage power generation equipment.
Article 9
Petroleum refineries or massive energy-consumption users’ efficiency shall meet the following rules of Best available techniques:
1.Utility systems and equipment (as table 1).
2.Processing techniques:
(1)Petroleum refineries or energy users’ processing techniques (as table 3).
(2)Semi-conductor or panel industrial processing techniques (as table 4).
Article 10
For the energy utilization manuals which do not comply with the format and essential particulars listed in the Article 16, Section 4 of the Act, or is incomplete, wrongful or omitted in the application documents, shall be asked to take corrective actions within the time prescribed in central competent authorities’ order. Applications shall be rejected if the corrective action is not made in time or fails to comply with the rules.
When the application documents have been found to comply with all requirements, the applicants shall pay the fee of review or revision within 15 days after receiving the notice. The preceding section applies mutatis mutandis if the applicants do not pay in accordance with the regulations.
Article 11
The central competent authorities shall make one of the following decisions according to Article 16, Section 2 of the Act after receiving the application according to Article 4 or the preceding article:
1.Approval.
2.Approval with incidental provisions.
3.Rejection.
Article 12
The central competent authorities shall make one of the following decisions according to Article 16, Section 2 of the Act
1.The consumption volume, category, or location listed on the energy utilization manual does not comply with rules set in Article 5 or Article 8.
2.The efficiency listed on the energy utilization manual does not comply with Article 7 or Article 9.
Article 13
The central competent authorities shall revoke the approval decision if the years of planned business operation listed in the approved energy utilization manual end, and one of the following circumstances exists:
1.Electricity generation:
(1)Not obtain the preparation approval for electricity enterprise establishment and registration in accordance with electricity enterprise relevant laws and regulations.
(2)The preparation approval for electricity enterprise establishment and registration has been withdrawn, revoked, or voided for other circumstances.
(3) The working permit of electricity enterprise has been withdrawn, revoked, or voided for other circumstances.
2.Cogeneration systems:
(1)Not obtain the working permit for self-usage power generation equipment in accordance with electricity enterprise relevant laws and regulations.
(2)The working permit for self-usage power generation equipment has been withdrawn, revoked, or voided for other circumstances.
3.Petroleum refineries:
(1)The approval for electricity consumption plan issued by an electricity enterprise provided with the energy utilization manual has been voided.
(2)Not obtain the permit to establish a petroleum refinery in accordance with Petroleum Administration Act.
(3)The permit to establish a petroleum refinery has been withdrawn, revoked, or voided for other circumstances.
4.Massive energy-consumption users:
(1)Letter of approval for Electricity Consumption Plan issued by an electricity enterprise provided with the energy utilization manual has been voided.
(2)Not obtain permit or approval in accordance with relevant enterprise administration laws or regulations.
(3) The permit or approval mentioned in the preceding sub-sub-section has been withdrawn, revoked, or voided for other circumstances.
Article 14
These regulations shall come into force after the promulgation date. Notwithstanding the foregoing, the enforcement date of article 4, section 2, sub-section 1 to 3, article 5, article 6, article 8, article 12, sub-section 1, article 13, sub-section 3, sub-sub-section 1, and sub-section 4, sub-sub-section 1 in the same article shall be promulgated by the central competent authorities separately.
Table 1 The Best Available Techniques Which Shall Be Applied in Utility Systems and Equipment
Utility technology items shall comply with the following contents of the Best Available Techniques.
I. Combustion handling systems
| Item |
| 1. Lignite pre-drying |
| 2. Coal gasification |
| 3. Fuel drying |
| 4. Biomass gasification |
| 5. Bark pressing |
| 6. Expansion turbine to recover the energy content of pressurized gases |
| 7. Advanced computerised control of combustion conditions for emission reduction and boiler performance |
| 8. Using flue-gas heat to supply district heating system |
| 9. Reducing excess air and make it reach the optimum air-fuel ratio |
| 10. Properly reducing the exhaust temperature to reduce heat loss |
| 11. Reducing the concentration of carbon monoxide in the exhaust gas and improving boiler efficiency |
| 12. Heat accumulation |
| 13. Cooling tower discharge |
| 14. Different techniques for the cooling system |
| 15. Using waste heat to preheat gas fuels to improve thermal efficiency |
| 16. Preheating combustion air to improve fuel efficiency |
| 17. Installing recuperative or regenerative burners to recover burner waste heat |
| 18. Controlling and optimizing combustion conditions by monitoring fuel, air flow rates, and oxygen content in flue gas |
| 19. Fuel choice |
| 20. Using oxygen-enriched combustion technology to improve energy efficiency |
| 21. Reducing heat loss by insulation |
| 22. Reducing heat loss caused by frequent opening and closing or poor sealing of furnace doors |
| 23. Fluidised bed combustion |
II. Heat recovery systems
| Item |
| 1. Monitoring the efficiency periodically |
| 2. Preventing or removing the internal scaling and external dust accumulation of equipment |
III. Steam handling systems
| Item |
| 1. Energy efficient design and installation of steam distribution pipework |
| 2. Throttling devices and the use of backpressure turbines: utilize backpressure turbines instead of PRVs |
| 3. Improve operating procedures and boiler controls |
| 4. Use sequential boiler controls (apply only to sites with more than one boiler) |
| 5. Install flue-gas isolation dampers (applicable only to sites with more than one boiler) |
6. For feed water preheating, the following methods are available:
(1)process waste heat recovery。
(2)recovery of heat energy from combustion air by economizer
(3)heating condensate with deoxygenated feed water
(4)using heat exchangers to condense the steam used for degassing and feed water heating
|
| 7. Prevention and removal of scale deposits on heat transfer surfaces. (Clean boiler heat transfer surfaces) |
| 8. Boiler blowdown is reduced by improving the water treatment system and installing automatic dissolved solids control equipment |
| 9. It is necessary to check and attach/repair the boiler refractory material during regular inspection |
| 10. Maintaining optimal discharge rate of degassers |
| 11. Minimise boiler short cycling losses |
| 12. Carrying out boiler maintenance |
| 13. Optimizing the steam distribution system |
| 14. Isolate steam from unused lines |
|
15. Regularly inspecting and confirming the heat insulation of steam pipes and condensate return pipes. (Confirming the proper heat insulation of the pipes, pipe fittings, valve bodies, and tanks)
|
| 16. Implement a control and repair programme for steam traps |
| 17. Collect and return condensate to the boiler for re-use. (Optimise condensate recovery) |
| 18. Re-use of flash-steam. (Use high pressure condensate to make low pressure steam) |
| 19. Recover energy from boiler blowdown |
| 20. Expansion turbine to recover the energy content of pressurised gases |
| 21. Change turbine blades when repairing |
| 22. Using advanced materials to meet high steam parameter requirements to improve efficiency |
| 23. Supercritical steam parameters |
| 24. Double reheat |
| 25. Regenerative feed-water |
| 26. Use of heat content of the flue-gas for district heating |
| 27. Heat accumulation |
| 28. Advanced computerised control of the gas turbine and subsequent recovery boilers |
IV. Electric power supply systems
| Item |
| 1. Installing capacitors in the AC circuits to decrease the magnitude of reactive power |
| 2. Minimising the operation of idling or lightly loaded motors |
| 3. Avoiding the operation of equipment above its rated voltage |
| 4. When a new or replacement motor is installed, a high efficiency motor (≥ IE3) should be used |
| 5. Ensure power cables have the correct dimensions for the power demand |
| 6. Keep online transformer(s) operating at a load above 40 ~50 % of the rated power |
| 7. Use high efficiency/low loss transformers |
| 8. Place equipment with a high current demand as close as possible to the power source (e.g. transformer) |
V. Electric motor drive subsystems
| Item |
| 1. Using efficient motors (EEMs) (≥ IE3) |
| 2. Proper motor sizing |
| 3. Installing high efficiency transmission/reducers |
| 4. Use: direct coupling where possible, synchronous belts or cogged V-belts in place of V belts, helical gears in place of worm gears |
| 5. Rewinding: avoid rewinding and replace with an EEM, or use a certified rewinding contractor (EEMR) |
| 6. Power quality control |
| 7. Lubrication, adjustments, tuning |
VI. Air compressor systems
| Item |
| 1. Overall system design, including multi-pressure systems |
| 2. Improve cooling, drying and filtering |
| 3. Reduce frictional pressure loss (for example by increasing pipe diameter) |
| 4. Improvement of drives (high efficiency motors) |
| 5. Improvement of drives (speed controller) |
| 6. Use of sophisticated control systems |
| 7. Recover waste heat for use in other functions |
| 8. Use external cool air as intake |
| 9. Storage of compressed air near highly-fluctuating uses |
| 10. Optimise certain end use devices |
| 11. Reduce compressed air leaks |
| 12. More frequent filter replacement |
| 13. Optimise working pressure |
VII. Pump systems
| Item |
| 1. Avoid oversizing when selecting pumps and replace oversized pumps |
| 2. Match the correct choice of pump to the correct motor for the duty |
| 3. Design of pipework system |
| 4. Control and regulation system |
| 5. Shut down unnecessary pumps |
| 6. Use of variable speed drives (VSDs) |
| 7. Using multiple pumps (number of units under control) |
| 8. Regular maintenance. Where unplanned maintenance becomes excessive, check for: cavitation, wear, wrong type of pump |
| 9. Minimise the number of valves and bends commensurate with keeping ease of operation and maintenance |
| 10. Avoid using too many bends (especially tight bends) |
| 11. Ensuring the pipework diameter is not too small (correct pipework diameter) |
VIII. Heating, ventilation, and air conditioning systems
| Item |
1. Overall system design. Identify and equip areas separately for
(1)general ventilation
(2)specific ventilation
(3)process ventilation
|
| 2. Optimise the number, shape, and size of intakes |
3. Use fans：
(1)of high efficiency
(2)designed to operate at optimal rate
|
| 4. Managing the airflow, including the consideration of dual ventilation systems (indoor and outdoor ventilation and heat exchange) |
5. Air system design：
(1)ducts are of a sufficient size
(2)circular ducts
(3)avoid long runs and obstacles such as bends, narrow sections
|
| 6. Optimise electric motors, and consider installing a VSD |
| 7. Use automatic control systems. Integrate with centralised technical management systems |
| 8. Integration of air filters into air duct system and heat recovery from exhaust air (heat exchangers) |
9. Reduce heating/cooling needs by：
(1)building insulation
(2)energy-efficient glazing
(3)air infiltration reduction
(4)automatic closure of doors
(5)destratification
(6)lowering of temperature set point during non-production period (programmable regulation)
(7)reduction of the set point for heating and raising it for cooling
|
10. Improve the efficiency of heating systems through：
(1)recovery or use of wasted heat
(2)heat pumps
(3)radiative and local heating systems coupled with reduced temperature set points in the non-occupied areas of the buildings
|
| 11. Improve the efficiency of cooling systems through the use of free cooling |
IX. Lighting systems
| Item |
| 1. Determining the lighting requirements based on the illuminance and spectral content (color temperature and color rendition) required by the predetermined task |
| 2. Plan space and activities in order to optimise the use of natural light |
| 3. Selection of fixtures and lamps according to specific requirements for the intended use |
| 4. Use of lighting management control systems, including occupancy sensors, timers, etc. |
| 5. Train building occupants to utilise lighting equipment in the most efficient manner |
X. Drying, separation and concentration processing systems
| Item |
| 1. Selecting the best separation technology or a combination of the following separation technologies to satisfy specific process equipment |
| 2. Use of surplus heat from other processes |
| 3. Use a combination of techniques |
| 4. Mechanical processes, e.g. filtration, membrane filtration |
5. Heat drying method:
(1)directly heated dryers
(2)indirectly heated dryers
(3)using multiple effect
|
| 6. Superheated steam |
| 7. Heat recovery (including MVR and heat pumps) |
| 8. Optimise insulation of the drying system |
| 9. Radiation processes |
| 10. Process automation in thermal drying processes |
XI. Industrial cooling systems
| Item |
1. The overall system is designed based on the requirements of the manufacturing process and factory and is categorized as:
(1)closed type
(2)open type
|
2. For the BAT of the design phase of the industrial cooling systems, the lowest energy consumption is achieved by the following combinations:
(1)reducing pressure loss in water flow and airflow
(2)adopting high efficiency and low energy consumption equipment
(3)reducing the number of energy-demanding equipment
(4)applying optimized cooling water treatment in water-cooled cooling systems to keep the heat transfer surfaces clean and avoid scaling, rusting, fouling, etc., so that in each individual case, the lowest energy consuming combination of the above factors must be achieved to operate the industrial cooling systems
|
3. The methods to reduce direct energy consumption are provided as follows. Fans or pumps:
(1)matching motors with high efficiency
(2)designing for optimum pressure loss and flow rate
(3)using speed variators
|
4. Operating the industrial cooling systems according to process requirements:
(1)water supply pressure
(2)backwater pressure
(3)temperature of water supply
(4)temperature difference between the water supply and back water
(5)pump efficiency
(6)fan motor efficiency
(7)point-of-use pressure requirements
|
Table 2 The Best Available Techniques Which Shall Be Applied in Processing Techniques for Electricity Generation or Cogeneration Systems
1.Energy Users as Electricity Generation:
Shall meet the requirements and efficiency values of energy efficiency related processing techniques of “new plants” or “new installations” listed in the following applicable edition of the European Union’s “Reference Document on Best Available Techniques for Large Combustion Plants”.
| “Reference Document on Best Available Techniques for Energy Efficiency” by Industries |
Applicable Edition |
| Large Combustion Plants |
BREF
BATC(12.2021)note |
Note ：BREF refers to the Industrial Emissions Directive (IED, 2010/75/EU) Best Available Techniques Reference Documents; BATC (12.2021) refers to the December 2021 edition.
2.Energy Users as Cogeneration Systems:
(1)Shall meet the cogeneration system related requirements listed in the European Union’s “Reference Document on Best Available Techniques for Energy Efficiency” for specific industries.
(2)If no preceding documents are applicable, it shall meet the requirements and efficiency values of energy efficiency related processing techniques of “new plants” or “new installations” listed in the following applicable edition of the European Union’s “Reference Document on Best Available Techniques for Large Combustion Plants”.
| “Reference Document on Best Available Techniques for Energy Efficiency” by Industries |
Applicable Edition |
| Large Combustion Plants |
BREF
BATC(12.2021)note |
Note ：BREF refers to the Industrial Emissions Directive (IED, 2010/75/EU) Best Available Techniques Reference Documents; BATC (12.2021) refers to the December 2021 edition.
(3) In the reference document mentioned by the preceding section, note (2) of Table 2 shall be revised as: “except for note (1), due to the factors such as Taiwan’s domestic conditions and the designing particularities of operation modes, the values of minimum energy efficiency may be further lowered; note (3) is not applicable.
Table 3 The Best Available Techniques Which Shall Be Applied in Processing Techniques for Petroleum Refineries and Massive Energy Consumption Users
1.Energy Users as Petroleum Refineries
Shall meet the requirements and efficiency values of energy efficiency related processing techniques listed in the following applicable edition of the European Union’s “Reference Document on Best Available Techniques for Refining of Mineral Oil and Gas”.
| “Reference Document on Best Available Techniques for Energy Efficiency” by Industries |
Applicable Edition |
| Refining of Mineral Oil and Gas |
BREF（2015）note |
Note ：BREF refers to the Industrial Emissions Directive (IED, 2010/75/EU) Best Available Techniques Reference Documents; BREF (2015) refers to the 2015 edition.
2.Energy Users as Massive Energy- Consumption Users
Shall meet the requirements and efficiency values of energy efficiency related processing techniques listed in the following applicable edition of the European Union’s “Reference Document on Best Available Techniques” for specific industries. However, semi conductor industries and panel industries shall meet rules set forth in Table 4.
| “Reference Document on Best Available Techniques for Energy Efficiency” by Industriesnote1 |
Applied Edition |
| (1)Ceramic Manufacturing Industry |
BREF（2007）note2 |
| (2)Ferrous Metals Processing Industry |
BREF（2001） |
| (3)Food, Drink and Milk Industries |
BREF（2019） |
| (4)Iron and Steel Production |
BREF（2013） |
| (5)Large Volume Inorganic Chemicals – Ammonia, Acids and Fertilisers |
BREF（2007） |
| (6)Large Volume Inorganic Chemicals – Solids and Others Industry |
BREF（2007） |
| (7)Large Volume Organic Chemicals |
BREF（2017） |
| (8)Manufacture of Glass |
BREF（2013） |
| (9)Manufacture of Organic Fine Chemicals |
BREF（2006） |
| (10)Non-ferrous Metals Industries |
BREF（2017） |
| (11)Production of Cement, Lime and Magnesium Oxide |
BREF（2013） |
| (12)Production of Chlor-alkali |
BREF（2014） |
| (13)Production of Polymers |
BREF（2007） |
| (14)Production of Pulp, Paper and Board |
BREF（2015） |
| (15)Production of Speciality Inorganic Chemicals |
BREF（2007） |
| (16)Slaughterhouses and Animals By-products Industries |
BREF（2005） |
| (17)Smitheries and Foundries Industry |
BREF（2005） |
| (18)Surface Treatment of Metals and Plastics |
BREF（2006） |
| (19)Surface Treatment Using Organic Solvents including Wood and Wood Products Preservation with Chemicals |
BREF（2020） |
| (20)Tanning of Hides and Skins |
BREF（2013） |
| (21)Textiles Industry |
BREF（2003） |
Note 1：Industries here refer to industries announced in the Industrial Emissions Directive (IED, 2010/75/EU) Best Available Techniques Reference Documents.
Note 2：BREF refers to the Industrial Emissions Directive (IED, 2010/75/EU) Best Available Techniques Reference Documents; BREF (2007) refers to the 2007 edition.
3.Co-generation system less than 50MW note
| Item |
| 1. System that generates effective thermal and electrical energy at the same time |
| 2. Steam turbines and the power generation system: considering the use of a computer-controlled system |
| 3. Steam turbines and the power generation system: considering the use of advanced materials |
| 4. Steam turbines and the power generation system: upgrading steam turbines requires a consideration of increasing steam temperature and pressure |
| 5. Steam turbines and the power generation system: optimizing working fluid operating conditions |
Note ：The items above refer to co-generation systems whose capacity are less than 50MW, and thus are not qualified to be categorized as the cogeneration systems in table2.
Table 4 Best Available Techniques for Semiconductor or Panel Industry Process Technology Items
Energy users in the semiconductor or panel industries shall comply with the contents and efficiency values of the process technology items related to energy efficiency listed in the Best Available Techniques for the same industries below.
1. The best available techniques that the semi-conductor process technology items should meet
| Best Available Techniques for Semiconductor Industry Process Technology Items |
| （1） |
For the system side [such as vacuum pumps, local scrubbers, chillers, heaters, exhausts, compressed dry air (CDA), ultrapure water, gas supply equipment], proposing energy-saving design solutions related to the tool system side (e.g. pressure loss, pipe diameter design, temperature difference, exhaust gas treatment using energy-saving intelligent control) or explaining the selection of a highly energy efficient tool. |
| （2） |
Adoption of highly efficient tool components:
The tool components are energy-efficient products or conform to the latest international norms for energy-saving facilities; and see the following examples for the relevant energy-saving component items :
1. Using energy-efficient products (e.g. CNS 14400 IE3 class or higher) for motors with high power (single item or total) or long operating hours.
2. Adopting variable frequency control for electrical facilities. (such as pumps additionally installed with variable frequency devices or energy-saving regulators, etc.)
3. High efficiency RF Generators. (power supply specification capacity should match the load of the RF Generators to avoid excessive design)
4. UPS with an energy-saving mode control function.
5. High efficiency heat exchangers. (e.g. low pressure loss or large temperature difference)
6. Choosing energy-saving products if the process allows, or providing proof of energy saving efficacy. (meeting or exceeding the latest energy efficiency standards in the past three years)
|
| （3） |
Tool resource control design:
1. For the selection of primary tools and auxiliary equipment, considering hardware and control design with energy-saving efficacy, such as various energy-saving designs and the standby mode.
2. Energy-saving optimization for process utility system: the consumption regulation design and management mechanism for exhaust, cooling, compressed air, inert gas (such as nitrogen), etc.
|
| （4） |
Energy management system.
1. For large-scale electricity and heat-consuming utility equipment, such as water chiller units, air handing units and cooling towers (kW/CMM), pumps (kW/CMM), air compressors (kW/CMM), etc., an energy baseline for the energy efficiency of equipment should be established, and the energy efficiency of the equipment should be monitored on a continuous and real-time basis and its abnormalities should be managed to facilitate equipment maintenance or replacement, and keep the equipment in a state of high energy-efficient operation. Or the energy consumption value of related important energy-consuming equipment can be measured or estimated in reference to the SEMI S23 standard along with the establishment of the energy consumption baseline for the plant and explanation of relevant energy-saving planning. For related equipment items, the following table can be considered for reference:
| (1)Exhaust |
(6)Water cooled by cooling-tower |
| (2)Vacuum |
(7)UPW or DIW ( Temp. < 25°C) |
| (3)CDA |
(8)Hot UPW or DIW ( Temp. > 85°C) |
| (4)High pressure CDA (827~1034 kPa gauge) |
(9)Heat load |
Heat removal via air |
| Heat removal via water |
| (5)Water cooled by refrigeration (ΔT = 5°C) |
(10)N2 |
2. The energy management system can be used to manage the consumption percentages and energy-saving status of all kinds of energy.
|
| （5） |
Process technology energy use intensity.
The process technology for products under 6 inches and 8-inch products must meet the top 10% (Top 10) energy use intensity benchmark values, as indicated in the table below:
Unit: KWh/Silicon Wafer Area—Square Centimeter
| |
Under 6 InchesNote 1 |
8 InchesNote 2 |
| Energy use intensity |
0.47 |
0.69 |
Note 1：Applicable to 6-inch products with 14 or less mask layers on average
Note 2：Applicable to 8-inch products with 15 or less mask layers on average
Note 3：If the average number of 6-inch mask layers exceeds 14, or the average number of 8-inch mask layers exceeds 15, or if the applicant is not compliant due to legal restrictions, patent protection, international trade barriers, or other factors not attributable to the applicant, the applicant is not subject to such restrictions after supporting materials are submitted.
Note 4： Energy use intensity calculation formula:
The above annual production area of silicon wafers under the same single dimension process is calculated by the formula: π × r 2 × the number of wafer slices (slices), where π is 3.1415926 and r is the radius of the silicon wafer (cm). |
2. Best Available Techniques Which Shall Be Applied in Processing Techniques for Panel Industries
| II. The Best Available Techniques for Panel Industriess |
| （1） |
Selection of Ancillary Devices for Equipment:
(1)Assess its energy efficiency as much as possible.
(2)Adopt a higher energy efficiency or variable frequency controller (such as the pump installed on equipment with a variable frequency drive or an energy saving device, etc.).
|
| （2） |
Energy-Saving Design:
The devices for equipment shall conform to the following:
(1) Idle mode with the considered of energy saving; or alternative designs of energy saving mode with the same function.
(2)The corresponding software with automatic or manual control to perform the energy saving control of the energy consuming ancillary devices under the standby mode such as a vacuum pump and an oven etc.
|
| （3） |
Energy Usage Intensity of Processing Techniques:
The processing techniques for the plants of the 5th generation and before, as well as the 5.5th generation to 8th generation plants must follow to the top 10’s (Top 10%) benchmark of energy usage intensity which is shown as below:
Unit: kilowatt hour/input glass substrate area m2
| |
5th Generation and before Plant(1) |
The 5.5th Generation Plant to the 8th Generation Plant(1) |
| Energy Usage Intensity |
148 |
110 |
Note 1：Applicable for the mask layer processing of amorphous LCD less than 5 PEP process, with the actual input capacity per month of both TFT-Array glass substrate and the color filter (CF) exceeded 120K (thousand pieces).
Note 2：Those due to the legitimation restrictions, patents protection, international trade barriers, or other causes not be attributable to the applicants, the given evidences should be submitted by the applicants.
Note 3：Equation for calculating energy usage intensity:
The previous annual input quantity of various sized glass substrate and color filters, are calculated by: color filter (m2/pc)× pieces of each size of glass substrate (piece).
|